Observation of silicon wafer Tencor profilometer Measurement of the refractive index and thickness of monolayers Cleanroom Microelectronics and Mi


Observation of silicon wafer Tencor profilometer Measurement of the refractive index and thickness of monolayers Cleanroom Microelectronics and Microsystems Unit CEIT Center of Studies and Technical Research University of Navarra, Donostia, Gipuzkoa, Basque Country, Spain


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