Pouring liquid nitrogen to improve the vacuum in the chamber to deposit thin films Vacuum Coating Systems Cleanroom Microelectronics and Microsyste


Pouring liquid nitrogen to improve the vacuum in the chamber to deposit thin films Vacuum Coating Systems Cleanroom Microelectronics and Microsystems Unit CEIT Center of Studies and Technical Research University of Navarra, Donostia, Gipuzkoa, Basque Country, Spain


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